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표면 분석법을 이용한 플라즈마에서의 보론박막 두께 측정
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 정진욱 | - |
| dc.date.accessioned | 2021-08-03T18:17:40Z | - |
| dc.date.available | 2021-08-03T18:17:40Z | - |
| dc.date.issued | 2011-02-09 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/56165 | - |
| dc.title | 표면 분석법을 이용한 플라즈마에서의 보론박막 두께 측정 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 제40회 한국진공학회 동계정기학술대회 | - |
| dc.citation.conferencePlace | 한국, 강원도 평창 | - |
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)