Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
The study on influence of carbon contamination on imaging performance of EUV mask using CSM/ICS
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 안진호 | - |
| dc.date.accessioned | 2021-08-03T18:50:16Z | - |
| dc.date.available | 2021-08-03T18:50:16Z | - |
| dc.date.issued | 20101020 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/57377 | - |
| dc.title | The study on influence of carbon contamination on imaging performance of EUV mask using CSM/ICS | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 2010 International symposium on Extreme Ultraviolet Lithography | - |
| dc.citation.conferencePlace | Japan | - |
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)