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Controllability of Workfunction and EOT Scaling with High-K/Metal Gate for Gate-First CMOS Applications
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 최창환 | - |
| dc.date.accessioned | 2021-08-03T19:20:33Z | - |
| dc.date.available | 2021-08-03T19:20:33Z | - |
| dc.date.created | 2021-06-30 | - |
| dc.date.issued | 2010-08-23 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/57919 | - |
| dc.publisher | International Union of Materials Research Societies | - |
| dc.title | Controllability of Workfunction and EOT Scaling with High-K/Metal Gate for Gate-First CMOS Applications | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | 최창환 | - |
| dc.identifier.bibliographicCitation | IUMRS-ICEM 2010 | - |
| dc.relation.isPartOf | IUMRS-ICEM 2010 | - |
| dc.citation.title | IUMRS-ICEM 2010 | - |
| dc.citation.conferencePlace | Seoul KINTEX, KOREA | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 1 | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Choi, Chang hwan
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)