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Metastable number density and stepwise ionization in a low-pressure inductively coupled argon plasma

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dc.contributor.author정진욱-
dc.date.accessioned2021-08-03T19:33:22Z-
dc.date.available2021-08-03T19:33:22Z-
dc.date.created2021-06-30-
dc.date.issued2010-07-04-
dc.identifier.urihttps://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/58225-
dc.publisherCommittee on Asia-Pacific Conference on Plasma Science and Technology-
dc.titleMetastable number density and stepwise ionization in a low-pressure inductively coupled argon plasma-
dc.typeConference-
dc.contributor.affiliatedAuthor정진욱-
dc.identifier.bibliographicCitationThe 10th Asia Pacific Conference on Plasma Science and Technology and the 23rd Symposium on Plasma S-
dc.relation.isPartOfThe 10th Asia Pacific Conference on Plasma Science and Technology and the 23rd Symposium on Plasma S-
dc.citation.titleThe 10th Asia Pacific Conference on Plasma Science and Technology and the 23rd Symposium on Plasma S-
dc.citation.conferencePlaceJeju, Korea-
dc.type.rimsCONF-
dc.description.journalClass1-
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