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A self-consistent model of collisionless oscillating sheaths for ion energy simulation in various types of dual frequency capacitively coupled plasma
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 정진욱 | - |
| dc.date.accessioned | 2021-08-03T19:33:24Z | - |
| dc.date.available | 2021-08-03T19:33:24Z | - |
| dc.date.issued | 2010-07-04 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/58227 | - |
| dc.title | A self-consistent model of collisionless oscillating sheaths for ion energy simulation in various types of dual frequency capacitively coupled plasma | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | The 10th Asia Pacific Conference on Plasma Science and Technology and the 23rd Symposium on Plasma S | - |
| dc.citation.conferencePlace | Jeju, Korea | - |
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)