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The effects of RF power on characteristics of interfacial layer between Al2O3 and Si3N4
- Authors
- 전형탁
- Issue Date
- 20-Jun-2010
- Place
- Seoul, korea
- Conference Name
- ALD 2010
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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