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리모트 플라즈마 원자층 증착 기술 및 high-k 응용
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 전형탁 | - |
| dc.date.accessioned | 2021-08-03T19:49:41Z | - |
| dc.date.available | 2021-08-03T19:49:41Z | - |
| dc.date.issued | 2010-05-13 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/58823 | - |
| dc.title | 리모트 플라즈마 원자층 증착 기술 및 high-k 응용 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 춘계학술발표대회 및 제 18회 신소재 심포지엄 | - |
| dc.citation.conferencePlace | 삼척 펠리스 호텔 | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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