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리모트 플라즈마 원자층 증착 기술 및 high-k 응용
- Authors
- 전형탁
- Issue Date
- 13-May-2010
- Place
- 삼척 펠리스 호텔
- Conference Name
- 춘계학술발표대회 및 제 18회 신소재 심포지엄
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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