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리모트 플라즈마 원자층 증착 기술 및 high-k 응용

Authors
전형탁
Issue Date
20100513
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/58823
Place
삼척 펠리스 호텔
Conference Name
춘계학술발표대회 및 제 18회 신소재 심포지엄
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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Jeon, Hyeongtag
COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)
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