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광학적/열적 특성 평가를 통한 ZrSi2 기반 펠리클 적용 가능성 검증
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 안진호 | - |
| dc.date.accessioned | 2021-07-30T08:07:46Z | - |
| dc.date.available | 2021-07-30T08:07:46Z | - |
| dc.date.issued | 20210520 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/5917 | - |
| dc.title | 광학적/열적 특성 평가를 통한 ZrSi2 기반 펠리클 적용 가능성 검증 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 2021 한국반도체디스플레이기술학회 | - |
| dc.citation.conferencePlace | 온라인 개최 | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)