유도 결합 플라즈마에서전자 빔의 생성 및 제어에 관한 연구
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 정진욱 | - |
dc.date.accessioned | 2021-07-30T08:07:47Z | - |
dc.date.available | 2021-07-30T08:07:47Z | - |
dc.date.created | 2021-06-30 | - |
dc.date.issued | 2021-05-20 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/5924 | - |
dc.publisher | 한국반도체디스플레이기술학회 | - |
dc.title | 유도 결합 플라즈마에서전자 빔의 생성 및 제어에 관한 연구 | - |
dc.type | Conference | - |
dc.contributor.affiliatedAuthor | 정진욱 | - |
dc.identifier.bibliographicCitation | 2021년 춘계학술대회 | - |
dc.relation.isPartOf | 2021년 춘계학술대회 | - |
dc.citation.title | 2021년 춘계학술대회 | - |
dc.citation.conferencePlace | 제주도 호텔난타 | - |
dc.type.rims | CONF | - |
dc.description.journalClass | 2 | - |
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
222, Wangsimni-ro, Seongdong-gu, Seoul, 04763, Korea+82-2-2220-1365
COPYRIGHT © 2021 HANYANG UNIVERSITY.
Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.