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Effect of Slurry pH and H2O2 on Crystalline Ge2Sb2Te5 CMP Performance for PRAM Device
- Authors
- 백운규
- Issue Date
- 6-Apr-2010
- Place
- San Francisco
- Conference Name
- 2010 MRS SPRING MEETING
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Collections - 서울 공과대학 > 서울 에너지공학과 > 2. Conference Papers
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Related Researcher
- Paik, Ungyu
- COLLEGE OF ENGINEERING (DEPARTMENT OF ENERGY ENGINEERING)