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Increase in the Adsorption Density of Anionic Molecules on Ceria and Its Influence on Remaining Particles on Oxide Film During Shallow Trench Isolation(STI) Chemical Mechanical Planarization (CMP)
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 백운규 | - |
| dc.date.accessioned | 2021-08-03T20:19:06Z | - |
| dc.date.available | 2021-08-03T20:19:06Z | - |
| dc.date.issued | 2010-04-06 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/59282 | - |
| dc.title | Increase in the Adsorption Density of Anionic Molecules on Ceria and Its Influence on Remaining Particles on Oxide Film During Shallow Trench Isolation(STI) Chemical Mechanical Planarization (CMP) | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 2010 MRS SPRING MEETING | - |
| dc.citation.conferencePlace | San Freancisco | - |
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Collections - 서울 공과대학 > 서울 에너지공학과 > 2. Conference Papers
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Related Researcher
- Paik, Ungyu
- COLLEGE OF ENGINEERING (DEPARTMENT OF ENERGY ENGINEERING)