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공정 플라즈마에서 실시간 유전박막두께 측정법의 보상연구
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 정진욱 | - |
| dc.date.accessioned | 2021-08-03T20:21:57Z | - |
| dc.date.available | 2021-08-03T20:21:57Z | - |
| dc.date.created | 2021-06-30 | - |
| dc.date.issued | 2010-02-17 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/59525 | - |
| dc.publisher | 한국진공학회(The Korean Vacuum Society) | - |
| dc.title | 공정 플라즈마에서 실시간 유전박막두께 측정법의 보상연구 | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | 정진욱 | - |
| dc.identifier.bibliographicCitation | 동계정기 학술대회 | - |
| dc.relation.isPartOf | 동계정기 학술대회 | - |
| dc.citation.title | 동계정기 학술대회 | - |
| dc.citation.conferencePlace | 한국, 강원도 횡성 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 2 | - |
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)