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Effect of Ge2Sb2Te5 Phase Property on Chemical Mechanical Polishing Performance

Authors
백운규
Issue Date
30-Nov-2009
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/59786
Place
Massachusetts, USA
Conference Name
2009 MRS Fall Meeting
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서울 공과대학 > 서울 에너지공학과 > 2. Conference Papers

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COLLEGE OF ENGINEERING (DEPARTMENT OF ENERGY ENGINEERING)
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