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Chemical Mechanical Polishing Characteristics of Phase Change Memory in Alkaline Slurry with Hydrogen Peroxide
- Authors
- 백운규
- Issue Date
- 22-Oct-2009
- Place
- 창원, 한국
- Conference Name
- 2009 한국물리학회 가을 학술 발표대회
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Collections - 서울 공과대학 > 서울 에너지공학과 > 2. Conference Papers
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Related Researcher
- Paik, Ungyu
- COLLEGE OF ENGINEERING (DEPARTMENT OF ENERGY ENGINEERING)