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Oxynitride Mediated Epitaxy For Epitaxial CoSi2 Growth

Authors
전형탁
Issue Date
20091008
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/60816
Place
덕산스파캐슬
Conference Name
2009년도 제7회 표면분석심포지엄
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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Jeon, Hyeongtag
COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)
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