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Oxynitride Mediated Epitaxy For Epitaxial CoSi2 Growth
- Authors
- 전형탁
- Issue Date
- 8-Oct-2009
- Place
- 덕산스파캐슬
- Conference Name
- 2009년도 제7회 표면분석심포지엄
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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