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Chemical shift analysis between Si3N4 and AL2O3 by XPS and AES

Authors
전형탁
Issue Date
8-Oct-2009
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/60817
Place
덕산스파캐슬
Conference Name
2009년도 제7회 표면분석심포지엄
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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