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Effects of Al2O3 capping layer of La2O3 gate dielectrics grown by remote plasma atomic layer deposition
- Authors
- 전형탁
- Issue Date
- 19-Jul-2009
- Place
- Monterey, California, USA
- Conference Name
- ALD 2009
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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