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Quasi-Damascene metal gate/high-k CMOS using oxygenation through gate electrodes
- Authors
- 최창환
- Issue Date
- 30-Jun-2009
- Publisher
- Cambridge University
- Citation
- Insulating Films on Semiconductor (INFOS)
- Conference Name
- Insulating Films on Semiconductor (INFOS)
- Place
- Cambridge, UK 2009
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Choi, Chang hwan
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)