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Pt Nanocrystals with Remote Plasma Atomic Layer Deposited HfO2 for Nonvolatile Memory Devices
- Authors
- 전형탁
- Issue Date
- 20090413
- Place
- San Francisco, CA USA
- Conference Name
- MRS 2009 spring meeting
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Jeon, Hyeongtag
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)