초고속플라즈마전자온도측정을통한2 MHz 유도결합플라즈마의전자가열및동력학적특성연구
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 정진욱 | - |
dc.date.accessioned | 2021-07-30T08:10:19Z | - |
dc.date.available | 2021-07-30T08:10:19Z | - |
dc.date.created | 2021-06-30 | - |
dc.date.issued | 2021-02-04 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/6248 | - |
dc.publisher | 한국진공학회 | - |
dc.title | 초고속플라즈마전자온도측정을통한2 MHz 유도결합플라즈마의전자가열및동력학적특성연구 | - |
dc.type | Conference | - |
dc.contributor.affiliatedAuthor | 정진욱 | - |
dc.identifier.bibliographicCitation | 제 60회 한국진공학회 동계정기학술대회 | - |
dc.relation.isPartOf | 제 60회 한국진공학회 동계정기학술대회 | - |
dc.citation.title | 제 60회 한국진공학회 동계정기학술대회 | - |
dc.citation.conferencePlace | 온라인 | - |
dc.type.rims | CONF | - |
dc.description.journalClass | 2 | - |
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