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초고속플라즈마전자온도측정을통한2 MHz 유도결합플라즈마의전자가열및동력학적특성연구
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 정진욱 | - |
| dc.date.accessioned | 2021-07-30T08:10:19Z | - |
| dc.date.available | 2021-07-30T08:10:19Z | - |
| dc.date.issued | 2021-02-04 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/6248 | - |
| dc.title | 초고속플라즈마전자온도측정을통한2 MHz 유도결합플라즈마의전자가열및동력학적특성연구 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 제 60회 한국진공학회 동계정기학술대회 | - |
| dc.citation.conferencePlace | 온라인 | - |
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)