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플라즈마에서 삼중 주파수를 이용한 밀리미터 두께의 유전체 두께 실시간 측정법 개발
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 정진욱 | - |
| dc.date.accessioned | 2021-07-30T08:10:19Z | - |
| dc.date.available | 2021-07-30T08:10:19Z | - |
| dc.date.issued | 2021-02-04 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/6250 | - |
| dc.title | 플라즈마에서 삼중 주파수를 이용한 밀리미터 두께의 유전체 두께 실시간 측정법 개발 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 제 60회 한국진공학회 동계정기학술대회 | - |
| dc.citation.conferencePlace | 온라인 | - |
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)