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Fabrication and evaluation of Ni-based high-k mask for high numerical aperture extreme ultraviolet lithography
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 안진호 | - |
| dc.date.accessioned | 2021-07-30T08:20:42Z | - |
| dc.date.available | 2021-07-30T08:20:42Z | - |
| dc.date.issued | 20210119 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/6295 | - |
| dc.title | Fabrication and evaluation of Ni-based high-k mask for high numerical aperture extreme ultraviolet lithography | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 2021 nano convergence conference | - |
| dc.citation.conferencePlace | 곤지암리조트 | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)