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Effect of negative ions by Oxygen on the electron energy distribution function
- Authors
- 정규선
- Issue Date
- 17-Jan-2021
- Publisher
- 한국진공학회
- Citation
- 8th International Conference on Microelectronics and Plasma Technology
- Conference Name
- 8th International Conference on Microelectronics and Plasma Technology
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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