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Reaction mechanism studies on ALD and CVD of Cobalt from dicobalt hexacarbonyl tert-butylacetylene
- Authors
- 전형탁
- Issue Date
- 20-Oct-2008
- Conference Name
- 55th AVS International Symposium & ExhibitionBoston, MA
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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