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Experimetal investigation on Edge-to-Center density ratio in an inductively coupled plasma
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 정진욱 | - |
| dc.date.accessioned | 2021-08-03T23:18:13Z | - |
| dc.date.available | 2021-08-03T23:18:13Z | - |
| dc.date.issued | 2008-10-13 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/63695 | - |
| dc.title | Experimetal investigation on Edge-to-Center density ratio in an inductively coupled plasma | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 61th Gaseous Electronics Conference | - |
| dc.citation.conferencePlace | 달라스, 미국 | - |
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)