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Effect of hydroxcyl Ethyl Cellulose Concentration in Colloidal Silica Slurry on Surface Roughness for Poly-Si Chemical Mechanical Polishing
- Authors
- 백운규
- Issue Date
- 20-Jun-2008
- Place
- 속초 한화리조트
- Conference Name
- 한국전기전자재료학회 2008 하계학술대회
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Collections - 서울 공과대학 > 서울 에너지공학과 > 2. Conference Papers
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Related Researcher
- Paik, Ungyu
- COLLEGE OF ENGINEERING (DEPARTMENT OF ENERGY ENGINEERING)