Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Physical and Electrical Chracteristics of ZrxHf1-xOy Films Deposited by Atomic Layer Deposition Method
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 전형탁 | - |
| dc.date.accessioned | 2021-08-04T00:49:28Z | - |
| dc.date.available | 2021-08-04T00:49:28Z | - |
| dc.date.issued | 2007-10-15 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/66567 | - |
| dc.title | Physical and Electrical Chracteristics of ZrxHf1-xOy Films Deposited by Atomic Layer Deposition Method | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | AVS 54th International Symposium & Exhibition | - |
| dc.citation.conferencePlace | Seattle, Washington | - |
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.