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Physical and Electrical Chracteristics of ZrxHf1-xOy Films Deposited by Atomic Layer Deposition Method
- Authors
- 전형탁
- Issue Date
- 15-Oct-2007
- Place
- Seattle, Washington
- Conference Name
- AVS 54th International Symposium & Exhibition
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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