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Comparison of Microchannel Quality between Poly Silicon and Chrome Hard Masks for Fabrication of Glass Microfluidic Chip

Authors
송시몬
Issue Date
5-Oct-2007
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/66657
Place
성남, 경기도
Conference Name
한국바이오칩학회 추계학술대회
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서울 공과대학 > 서울 기계공학부 > 2. Conference Papers

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COLLEGE OF ENGINEERING (SCHOOL OF MECHANICAL ENGINEERING)
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