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Characteristics of Nitrided Hf-Silicate Deposited by Remote Plasma ALD Method
- Authors
- 전형탁
- Issue Date
- 25-Jun-2007
- Place
- Kona Kai Resort, San Diego, CA, USA
- Conference Name
- 7th AVS International Conference on Atomic Layer Deposition
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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