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Crystalline Structure of Ceria Particles Controlled by the Oxygen Partial Pressure and STI CMP Performances
- Authors
- 백운규
- Issue Date
- 12-Jun-2007
- Place
- 라마다 호텔, 제주도
- Conference Name
- JEJU 2007ISPM
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Collections - 서울 공과대학 > 서울 에너지공학과 > 2. Conference Papers
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Related Researcher
- Paik, Ungyu
- COLLEGE OF ENGINEERING (DEPARTMENT OF ENERGY ENGINEERING)