ConferenceIssue Date2013Citation5th Inter. Symp. on Advanced Plasma Science and its Appl. for Nitrides and Nanomaterials (ISPlasma 2013)PublisherISPlasma 2013 committeePlaceNagoya University, Japan
ConferenceIssue Date2013Citation5th Inter. Symp. on Advanced Plasma Science and its Appl. for Nitrides and Nanomaterials (ISPlasma 2013)PublisherISPlasma 2013 committeePlaceNagoya University, Japan
ConferenceIssue Date2013Citation5th Inter. Symp. on Advanced Plasma Science and its Appl. for Nitrides and Nanomaterials (ISPlasma 2013)PublisherISPlasma 2013 committeePlaceNagoya University, Japan