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Structural Analysis of Amorphous H:SiON Films through Gas Transport Properties

Authors
박호범
Issue Date
13-Nov-2020
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/6886
Place
대전
Conference Name
한국막학회 학술발표회
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서울 공과대학 > 서울 에너지공학과 > 2. Conference Papers

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COLLEGE OF ENGINEERING (DEPARTMENT OF ENERGY ENGINEERING)
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