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극자외선 노광 공정용 반사 마스크의 흡수체 특성 평가
- Authors
- 정용재
- Issue Date
- 20-Oct-2006
- Place
- 대구
- Conference Name
- 2006 추계 한국세라믹학회
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Chung, Yong Chae
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)