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Nanoparticle engineering for next generation poly isolation chemical mechanical planarization in ULSI Process
- Authors
- 백운규
- Issue Date
- 28-Jun-2006
- Place
- 캐나다 토론토
- Conference Name
- 1st International Congress on Ceramic
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Collections - 서울 공과대학 > 서울 에너지공학과 > 2. Conference Papers
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Related Researcher
- Paik, Ungyu
- COLLEGE OF ENGINEERING (DEPARTMENT OF ENERGY ENGINEERING)