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Effects of amorphous-silicon and poly-silicon films on within-wafer non-uniformity(WIWNU) improvement in chemical mechanical polishing
- Authors
- 백운규
- Issue Date
- 19-May-2006
- Place
- 경상대학교
- Conference Name
- 2006년도 춘계 한국재료학회
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Collections - 서울 공과대학 > 서울 에너지공학과 > 2. Conference Papers
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Related Researcher
- Paik, Ungyu
- COLLEGE OF ENGINEERING (DEPARTMENT OF ENERGY ENGINEERING)