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Dependence of Decarbonation of Cerium Precursor on Synthesized Ceria Particle and Its Influence of STI CMP Performance
- Authors
- 백운규
- Issue Date
- 10-May-2006
- Place
- 캐나다 덴버
- Conference Name
- The 209th Meeting of The Electrochemical Society
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Collections - 서울 공과대학 > 서울 에너지공학과 > 2. Conference Papers
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Related Researcher
- Paik, Ungyu
- COLLEGE OF ENGINEERING (DEPARTMENT OF ENERGY ENGINEERING)