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Impact of O3 on the Ferroelectric Properties and Its Time-Dependent Deterioration of ALD HfxZr1-xO2 Thin Film
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 최창환 | - |
| dc.date.accessioned | 2021-07-30T08:28:51Z | - |
| dc.date.available | 2021-07-30T08:28:51Z | - |
| dc.date.created | 2021-06-30 | - |
| dc.date.issued | 2020-11-04 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/7082 | - |
| dc.publisher | KIM | - |
| dc.title | Impact of O3 on the Ferroelectric Properties and Its Time-Dependent Deterioration of ALD HfxZr1-xO2 Thin Film | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | 최창환 | - |
| dc.identifier.bibliographicCitation | The 6th International Conference on Electronic Materials and Nanotechnology for Green Environment (ENGE) | - |
| dc.relation.isPartOf | The 6th International Conference on Electronic Materials and Nanotechnology for Green Environment (ENGE) | - |
| dc.citation.title | The 6th International Conference on Electronic Materials and Nanotechnology for Green Environment (ENGE) | - |
| dc.citation.conferencePlace | 제주 라마다호텔 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 1 | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Choi, Chang hwan
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)