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"Characteristics of HfN deposited by using Remote Plasma Enhanced Atomic Layer Deposition Method"
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 전형탁 | - |
| dc.date.accessioned | 2021-08-04T03:51:07Z | - |
| dc.date.available | 2021-08-04T03:51:07Z | - |
| dc.date.issued | 2005-11-02 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/71233 | - |
| dc.title | "Characteristics of HfN deposited by using Remote Plasma Enhanced Atomic Layer Deposition Method" | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | AVS 52nd International Symposium & Exhibition | - |
| dc.citation.conferencePlace | Hynes Convention Center, Boston, MA. | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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