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Charateristics of hybrid mask mold for combined nanoimprint and photolithography technique
- Authors
- 안진호
- Issue Date
- 29-Sep-2005
- Place
- 코엑스
- Conference Name
- 2005 한국반도체 및 디스플레이장비학회 추계학술대회
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)