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The Reduced Residual Compressive Stress of Si-incorporated ta-C Films: Molecular Dynamics Study

Authors
정용재
Issue Date
23-Sep-2005
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/71926
Place
대한민국
Conference Name
2005 대한금속재료학회
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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Chung, Yong Chae
COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)
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