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Growth of Cobalt-silicide by Remote Plasma ALD method
- Authors
- 전형탁
- Issue Date
- 8-Aug-2005
- Place
- San Jose CA
- Conference Name
- Atomic Layer Deposition 2005 (ALD` 05)
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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