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Effects of Grain Size and Molecular Weight of Surfactant in Nano-Ceria Slurry on Removal Selectivity of SiO2/Si3N4 Films on Pattern Wafers
- Authors
- 백운규
- Issue Date
- 9-Jun-2005
- Place
- 중국 베이징
- Conference Name
- china nano 2005
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Collections - 서울 공과대학 > 서울 에너지공학과 > 2. Conference Papers
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Related Researcher
- Paik, Ungyu
- COLLEGE OF ENGINEERING (DEPARTMENT OF ENERGY ENGINEERING)