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실리콘이 함유된 비정질 탄소박막의 잔류응력 거동 전산모사
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- 정용재
- Issue Date
- 20-May-2005
- Place
- 서울
- Conference Name
- 2005년도 한국표면공학회 춘계학술발표회
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Chung, Yong Chae
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)