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Effect of Nano-Ceria Grain Size and Slurry pH on Secondary Particle Distribution and Removal Rate in STI CMP
- Authors
- 백운규
- Issue Date
- 22-Apr-2005
- Place
- 이화여자대학교
- Conference Name
- 한국물리학회
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Collections - 서울 공과대학 > 서울 에너지공학과 > 2. Conference Papers
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Related Researcher
- Paik, Ungyu
- COLLEGE OF ENGINEERING (DEPARTMENT OF ENERGY ENGINEERING)