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The Role of Molecular Weight of Poly(Acrylic Acid) on the Oxide-to-Nitride Selectivity in STI CMP
- Authors
- 박재근
- Issue Date
- 3-Nov-2004
- Place
- Senri-Hankyu Hotel, Osaka, Japan
- Conference Name
- EnCera 04, The 3rd International Symposium on the Science of Engineering Ceramics
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Collections - 서울 공과대학 > 서울 융합전자공학부 > 2. Conference Papers
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