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Effect of Abrasive Size and Concentration on the Non-Prestonian Behavior of Ceria Slurry with Surfactant for STI-CMP
- Authors
- 박재근
- Issue Date
- 23-Oct-2004
- Place
- Jeju University, Jeju, Korea
- Conference Name
- 2004 Fall meeting of Korean Physical Society
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Collections - 서울 공과대학 > 서울 융합전자공학부 > 2. Conference Papers
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